White light interferometer, an image processing method and image processing program

摘要

PROBLEM TO BE SOLVED: To provide a white-color interferometer, an image processing method and an image processing program that are capable of generating an image efficient for image measurement without receiving no influence of interference fringe.SOLUTION: A white-color interferometer comprises: a light source that has a wideband spectrum; an optical system that leads the light from the light source to a measured object and a reference surface, combines the light reflected by the measured object with the light reflected by the reference surface, and generates an image showing interference light intensity corresponding to each measurement position within a measurement surface of the measurement object which changes according to a difference in optical path length between the lights; and calculation means that obtains a position in an optical axis direction at each measurement position of the measured object on the basis of an interference light intensity line which consists of interference light intensity information showing the interference light intensity at each measurement position of the image output from the optical system. The calculation means calculates average luminance information from the interference light intensity information in a predetermined range including a peak value of the interference light intensity line, and obtains the calculated average luminance information for all measurement positions within the measurement surface, and then generates measurement image information.