COMPUTERIZATION OF WHITE-LIGHT CONTACT INTERFEROMETERS BASED ON OPTICAL IMAGE PROCESSING

摘要

A technique of computerization of white-light contact interferometers intended for calibration of reference end gauges and other objects in the range 0.1-1000 mm with resolution 0.001μm is considered. Results are presented from studies of contact interferometers based on digital processing of interference images with the use of corresponding mathematical software.