Removal solution and removal method of oxide of group III-V element, treatment liquid of compound of group III-V element, antioxidant of III-V element, treatment liquid of semiconductor substrate and method of manufacturing semiconductor substrate product

摘要

Removing liquid of oxide of group III-V element, antioxidant or treating solution containing an acid and a mercapto compound, a method using them, and a process for treating a semiconductor substrate containing an acid and a mercapto compound Liquid treatment liquid and method for manufacturing semiconductor substrate product using the same.