首页> 外国专利> LAMINATED CERAMIC CHIP COMPONENT INCLUDING NANO THIN FILM LAYER, MANUFACTURING METHOD THEREFOR, AND ATOMIC LAYER VAPOR DEPOSITION APPARATUS THEREFOR

LAMINATED CERAMIC CHIP COMPONENT INCLUDING NANO THIN FILM LAYER, MANUFACTURING METHOD THEREFOR, AND ATOMIC LAYER VAPOR DEPOSITION APPARATUS THEREFOR

机译:包括纳米薄膜层的层压陶瓷芯片组件,其制造方法及其原子层气相沉积设备

摘要

The present disclosure discloses the laminated ceramic chimp component including an element part having a ceramic main body and an internal electrode placed in the ceramic main body; an external electrode part having a first external electrode and a second external electrode, the first and second external electrodes being provided with side electrodes covering both side surfaces of the ceramic main body, respectively, upper electrodes covering portions of both sides of an upper surface of the ceramic main body, respectively, and lower electrodes covering portions of both sides of a lower surface of the ceramic main body, respectively; and a nano thin film layer formed of electric insulation material and applied to a region including the upper electrodes, the method for manufacturing the same and the atomic layer deposition apparatus for the same.
机译:本发明公开了一种叠层陶瓷黑猩猩组件,其包括具有陶瓷主体的元件部分和放置在陶瓷主体中的内部电极。具有第一外部电极和第二外部电极的外部电极部,在第一外部电极和第二外部电极上设置有分别覆盖陶瓷主体的两个侧面的侧面电极,覆盖上表面的两个侧面的上部电极。所述陶瓷主体和分别覆盖所述陶瓷主体的下表面的两侧的下部电极。以及由电绝缘材料形成的纳米薄膜层,被施加到包括上电极的区域,其制造方法以及用于该上电极的原子层沉积设备。

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