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FLOATING-SHIELD TRIPLE-GATE MOSFET

机译:浮动屏蔽三栅极MOSFET

摘要

Apparatus and associate methods relate to a high-voltage MOSFET bounded by two trenches, each having dielectric sidewalls and a dielectric bottom isolating a top field plate and a bottom field plate. The top field plate is electrically connected to a biasing circuit net, and the bottom field plate is biased via a capacitive coupling to the top field plate. The upper field plate and lower field plate are configured to deplete the majority carriers in a drain region of the MOSFET bounded by the two trenches so as to equalize two local maxima of an electric field induced by a drain/body bias, the two local maxima located proximate a drain/body metallurgical junction and proximate a trench bottom. The two local maxima of the electric field are equalized by controlling a depth location of an intervening dielectric between the upper field plate and the lower field plate.
机译:装置和相关方法涉及由两个沟槽界定的高压MOSFET,每个沟槽具有电介质侧壁和电介质底部,其隔离顶部场板和底部场板。顶部场板电连接到偏置电路网,并且底部场板通过电容耦合而偏置到顶部场板。上场板和下场板被配置为耗尽由两个沟槽界定的MOSFET的漏极区域中的多数载流子,以均衡由漏极/主体偏置引起的电场的两个局部最大值,这两个局部最大值位于漏极/主体冶金结附近和沟槽底部附近。通过控制在上场板和下场板之间的介电层的深度位置,可以使电场的两个局部最大值相等。

著录项

  • 公开/公告号US2017236934A1

    专利类型

  • 公开/公告日2017-08-17

    原文格式PDF

  • 申请/专利权人 POLAR SEMICONDUCTOR LLC;

    申请/专利号US201615045984

  • 发明设计人 DON RANKILA;

    申请日2016-02-17

  • 分类号H01L29/78;H01L21/326;H01L29/40;

  • 国家 US

  • 入库时间 2022-08-21 13:51:32

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