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CARBON NANOTUBE ARRAY, MATERIAL, ELECTRONIC DEVICE, PROCESS FOR PRODUCING CARBON NANOTUBE ARRAY, AND PROCESS FOR PRODUCING FIELD EFFECT TRANSISTOR
CARBON NANOTUBE ARRAY, MATERIAL, ELECTRONIC DEVICE, PROCESS FOR PRODUCING CARBON NANOTUBE ARRAY, AND PROCESS FOR PRODUCING FIELD EFFECT TRANSISTOR
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机译:碳纳米管阵列,材料,电子设备,碳纳米管阵列的制造过程以及场效应晶体管的制造过程
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摘要
In order to obtain a carbon nanotube array including no m-CNTs through simple steps using a mechanism that is different from thermocapillary flow, there are provided a process for producing a carbon nanotube array including (A) a step of preparing a carbon nanotube array in which m-CNTs and s-CNTs are horizontally aligned; (B) a step of forming an organic layer on the carbon nanotube array; (C) a step of applying voltage to the carbon nanotube array in a long axis direction of the carbon nanotubes constituting the carbon nanotube array in the air; and (D) a step of removing the organic layer, and a carbon nanotube array obtained by the process.
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