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SPLIT MEMORY CELLS WITH UNSPLIT SELECT GATES IN A THREE-DIMENSIONAL MEMORY DEVICE
SPLIT MEMORY CELLS WITH UNSPLIT SELECT GATES IN A THREE-DIMENSIONAL MEMORY DEVICE
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机译:在三维存储设备中具有不匹配选择门的拆分存储细胞
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摘要
Split memory cells can be provided within an alternating stack of insulating layers and word lines. At least one lower-select-gate-level electrically conductive layers and/or at least one upper-select-level electrically conductive layers without a split memory cell configuration can be provided by limiting the levels of separator insulator structures within the levels of the word lines. At least one etch stop layer can be formed above at least one lower-select-gate-level spacer material layer. An alternating stack of insulating layers and spacer material layers is formed over the at least one etch stop layer. Separator insulator structures are formed through the alternating stack employing the etch stop layer as a stopping structure. Upper-select-level spacer material layers can be subsequently formed. The spacer material layers and the select level material layers are formed as, or replaced with, electrically conductive layers.
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