Method of advancing a probe tip of a scanning microscopy device towards a sample surface, and device therefore

摘要

The invention is directed at a method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface. The scanning microscopy device comprises the probe for scanning the sample surface for mapping nanostructures on the sample surface. The probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface. The method comprises controlling, by a controller, an actuator system of the device for moving the probe to the sample surface, and receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling. The method further comprises maintaining, during said controlling, an electric field between the sample surface and the probe tip, and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining proximity of the sample surface relative to the probe tip. The invention is further directed at a scanning microscopy device comprising a probe for scanning a sample surface for mapping nanostructures thereon.