首页> 外国专利> APPARATUS AND METHOD FOR PLACING STRESSORS WITHIN AN INTEGRATED CIRCUIT DEVICE TO MANAGE ELECTROMIGRATION FAILURES

APPARATUS AND METHOD FOR PLACING STRESSORS WITHIN AN INTEGRATED CIRCUIT DEVICE TO MANAGE ELECTROMIGRATION FAILURES

机译:在集成电路设备中放置应力以管理电击故障的装置和方法

摘要

An integrated circuit device includes a first line in a first metal layer of the integrated circuit device, wherein the first line forms at least a portion of an interconnect, a second line in a second metal layer of the integrated circuit device, and a first via that couples the first line to the second line. The integrated circuit device further includes a first stressor disposed at a first area of the interconnect, wherein the first area at least partially overlaps the first via, wherein the first stressor alters an electromigration stress profile for the interconnect by altering a stress at the first area to be less tensile.
机译:一种集成电路装置,其包括在集成电路装置的第一金属层中的第一线,其中第一线形成互连的至少一部分,在集成电路装置的第二金属层中的第二线,以及第一通孔将第一行与第二行耦合。该集成电路器件还包括布置在互连的第一区域处的第一应力器,其中第一区域至少部分地与第一通孔重叠,其中第一应力器通过改变第一区域处的应力来改变互连的电迁移应力分布。减少拉伸。

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