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Interferometric distance measuring method for measuring surfaces, and such a measuring arrangement

机译:用于测量表面的干涉距离测量方法以及这种测量装置

摘要

A distance measuring method for measuring surfaces uses a laser source having a frequency that can be modulated to tune a wavelength of a laser beam in a wavelength range. The laser beam is generated with a coherence length to provide a measuring beam and is emitted at the surface, located within a specified distance range, as a measuring beam. The measuring beam is back-scattered by the surface and is received again and used to interferometrically measure the distance from a reference point to the surface. The specified distance range lies at least partly outside of the coherence length. One portion of the laser beam is temporally delayed with respect to another portion, such that the one optical path difference caused by the delay matches the optical path difference that corresponds to a distance in the specified distance range plus or minus the coherence length of the laser.
机译:用于测量表面的距离测量方法使用激光源,该激光源的频率可以被调制以在波长范围内调谐激光束的波长。产生具有相干长度的激光束以提供测量束,并且该激光束作为测量束在位于指定距离范围内的表面处发射。测量光束被表面反向散射,并再次被接收,并用于干涉测量从参考点到表面的距离。规定的距离范围至少部分位于相干长度之外。激光束的一部分相对于另一部分在时间上有所延迟,以使由延迟引起的一个光程差与指定距离范围内的距离相加或减去激光器的相干长度所对应的光程差相匹配。 。

著录项

  • 公开/公告号US9677870B2

    专利类型

  • 公开/公告日2017-06-13

    原文格式PDF

  • 申请/专利权人 THOMAS JENSEN;

    申请/专利号US201214129044

  • 发明设计人 THOMAS JENSEN;

    申请日2012-06-25

  • 分类号G01B11/02;G01B9/02;

  • 国家 US

  • 入库时间 2022-08-21 13:46:08

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