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Thin films having large temperature coefficient of resistance and methods of fabricating same

机译:电阻温度系数大的薄膜及其制造方法

摘要

An apparatus comprises a head transducer and a resistive temperature sensor provided on the head transducer. The resistive temperature sensor comprises a first layer comprising a conductive material and having a temperature coefficient of resistance (TCR) and a second layer comprising at least one of a specular layer and a seed layer. A method is disclosed to fabricate such sensor with a laminated thin film structure to achieve a large TCR. The thicknesses of various layers in the laminated thin film are in the range of few to a few tens of nanometers. The combinations of the deliberately optimized multilayer thin film structures and the fabrication of such films at the elevated temperatures are disclosed to obtain the large TCR.
机译:一种设备,包括头换能器和设置在头换能器上的电阻温度传感器。电阻温度传感器包括第一层和第二层,第一层包括导电材料并具有电阻温度系数(TCR),第二层包括镜面层和种子层中的至少一个。公开了一种制造具有层压薄膜结构以实现大TCR的传感器的方法。层压薄膜中各层的厚度在几纳米到几十纳米的范围内。公开了故意优化的多层薄膜结构和在高温下制造这种膜的组合以获得大的TCR。

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