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Polymer for preparing resist underlayer film, resist underlayer film composition containing the polymer and method for forming resist underlayer film using the composition

机译:用于制备抗蚀剂下层膜的聚合物,包含该聚合物的抗蚀剂下层膜组合物以及使用该组合物形成抗蚀剂下层膜的方法

摘要

Provided are a fluoreneol-based monomer, a polymer for preparing a resist underlayer film obtained therefrom, a resist underlayer film composition containing the polymer, and a method for forming a resist underlayer film using the resist underlayer film composition, wherein the fluoreneol-based monomer is represented by Chemical Formula 2 below:; embedded image
机译:提供一种芴基单体,用于制备由其获得的抗蚀剂下层膜的聚合物,包含该聚合物的抗蚀剂下层膜组合物以及使用该抗蚀剂下层膜组合物形成抗蚀剂下层膜的方法,其中,所述芴基单体由下面的化学式2表示: “嵌入式图像”

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