Enhancement of the orientation and adhesion of Al films on LiNbO_3 with Ni underlayer

摘要

Al/Ni films were deposited on 128° Y-X LiNbO3 substrates by e-beam deposition. The influence of Ni under- layer on the microstructure, adhesion and resistivity of the Al/Ni films was investigated. It was found that Al films deposited on Ni underlayer thinner than 5 nm possessed strong texture. The textured Al/Ni films had a superior adhesion. Their resis- tivity decreased after annealing treatment at 200°C for 30 min. With the textured Al/Ni films, a 2.30 GHz-range im- age-impedance connection SAW (Surface Acoustic Wave) filter was successfully fabricated.