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Monolithic integration of CMOS and non-silicon devices
Monolithic integration of CMOS and non-silicon devices
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机译:CMOS和非硅器件的单片集成
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摘要
A method includes attaching a partially processed CMOS wafer to a second wafer to produce a combined wafer. The second wafer comprises a first region including a material different from silicon. The method also includes forming devices in the first region or in a second region of the combined wafer having a material different from silicon.
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