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Semiconductor device and method of using substrate having base and conductive posts to form vertical interconnect structure in embedded die package
Semiconductor device and method of using substrate having base and conductive posts to form vertical interconnect structure in embedded die package
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机译:半导体器件和使用具有基底和导电柱的衬底在嵌入式管芯封装中形成垂直互连结构的方法
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摘要
A semiconductor device has a substrate including a base and a plurality of conductive posts extending from the base. The substrate can be a wafer-shape, panel, or singulated form. The conductive posts can have a circular, rectangular, tapered, or narrowing intermediate shape. A semiconductor die is disposed through an opening in the base between the conductive posts. The semiconductor die extends above the conductive posts or is disposed below the conductive posts. An encapsulant is deposited over the semiconductor die and around the conductive posts. The base and a portion of the encapsulant is removed to electrically isolate the conductive posts. An interconnect structure is formed over the semiconductor die, encapsulant, and conductive posts. An insulating layer is formed over the semiconductor die, encapsulant, and conductive posts. A semiconductor package is disposed over the semiconductor die and electrically connected to the conductive posts.
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