wherein each of R1-R5 is the same as or different from one another, with each being independently selected from among hydrogen, C1-C12 alkyl, C1-C12 amino, C6-C10 aryl, C1-C12 alkoxy, C3-C6 alkylsilyl, C2-C12 alkenyl, R1R2R3NNR3, wherein R1, R2 and R3 may be the same as or different from one another and each is independently selected from hydrogen and C1-C6 alkyl, and pendant ligands including functional group(s) providing further coordination to the metal center M. The precursors of the above formula are useful to achieve uniform coating of high dielectric constant materials in the manufacture of flash memory and other microelectronic devices."/>
公开/公告号US9534285B2
专利类型
公开/公告日2017-01-03
原文格式PDF
申请/专利权人 ENTEGRIS INC.;
申请/专利号US201414301861
申请日2014-06-11
分类号C23C16/40;C23C14/08;C07F17/00;C23C16/455;
国家 US
入库时间 2022-08-21 13:41:44