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Bulk fin formation with vertical fin sidewall profile
Bulk fin formation with vertical fin sidewall profile
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机译:具有垂直鳍侧壁轮廓的大鳍形成
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摘要
Fabricating a semiconductor device includes providing a substrate, wherein the substrate is comprised of a base layer, a doped silicon layer on top of the base layer, and an undoped silicon layer on top of the doped silicon layer; forming a hard mask layer on top of the substrate; forming at least one mandrel on top of the hard mask layer; forming a spacer layer on top of exposed portions of the hard mask layer and the at least one mandrel; etching portions of the spacer layer; removing the at least one mandrel; etching regions of the hard mask layer and the undoped silicon layer not protected by remaining portions of the spacer layer to form at least one fin; and removing the remaining portions of the spacer layer.
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