ASYMMETRIC PHONONIC CRYSTAL (PNC) TETHERING FOR RADIO FREQUENCY (RF) MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) RESONATOR�

摘要

ABSTRACT Embodiments herein provide an asymmetric phononic crystal (PnC) tethering for RF MEMS resonators. The tethering includes a plurality of asymmetric unit cells. Further, each asymmetric unit cell includes two semicircular inclusions with their centers displaced from each other by twice the value of distance between each inclusion. FIG. 1