APPARATUS FOR VARYING RESONANT FREQUENCY IN A MULTI-FREQU NCY RADIO FREQUENCY (RF) MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) SWITCH

摘要

Embodiments herein provide an apparatus for varying resonant frequency in a multi-frequency radio frequency (RF) Micro-Electro-Mechanical System (MEMS) capacitive switch. The apparatus includes a multi-frequency RF MEMS capacitive switch, a plurality of floating metals spaced uniformly in the multi-frequency RF MEMS capacitive switch, lateral thermal actuator, push-pull beam with contact arm and a buckling capacitor. Further, a first direct current (DC) voltage is applied to the lateral thermal actuator and a second DC voltage is applied to the buckling actuator. The buckling actuator is shifted from a first position to a second position when the second DC voltage is applied to the buckling actuator. The push-pull beam is displaced by the lateral thermal actuator towards the plurality of floating metals when the first DC voltage is applied to the lateral thermal actuator. Furthermore, resonant frequency of RF MEMS capacitive switch is varied based on position of push pull beam on plurality of floating metals.