A substrate carrier assembly, a substrate carrier as well as a shielding segment for use in such substrate carrier assembly.

摘要

The invention relates to a substrate carrier assembly for use in a system for growing epitaxial layers on semiconductor substrates by chemical vapor deposition, said substrate carrier assembly comprising a substrate carrier having a first surface side, an area part of said first surface being provided with recessed pockets for accommodating - during use - said semiconductor substrates, as well as one or more shielding segments configured as removable-positioned plate shaped elements having a covering surface side for substantially covering the remaining area part of said first surface neighboring said pockets, as well as interlocking means for interlocking said one or more shielding segments with said substrate carrier. Moreover the invention also relates to a substrate carrier as well as a shielding segment for use in such substrate carrier assembly.