CRUCIBLE MANAGING SYSTEM, CRUCIBLE MANAGING METHOD, METHOD FOR MANUFACTURING SILICA GLASS CRUCIBLE, METHOD FOR MANUFACTURING SILICON INGOT, AND METHOD FOR MANUFACTURING HOMOEPITAXIAL WAFER

摘要

The purpose of the present invention is to solve the problem of testing a silica glass crucible before deformation and not being able to identify the problem. The present invention includes: an inner reflected light detection means that emits laser light toward an inner surface of a silica glass crucible and detects the inner surface reflected light; an inner distance calculation means that calculates an inner surface distance on the basis of the detection resu a coordinate calculation means that calculates inner surface coordinates on the basis of the inner surface distance and three-dimensional coordinates which indicate the position of the inner reflected light detection means when the inner surface reflected light, from which the inner surface distance is calculated, is detected; an inner surface image data acquisition means that acquires image data of the inner surface of the silica glass crucible; and a crucible data information storage means that stores, as crucible data information for each silica glass crucible, information associating the image data acquired by the inner surface image data acquisition means and the inner surface coordinates which indicate an imaging location of the image data.