Crucible inspection apparatus, crucible inspection method, silica glass crucible, silica glass crucible manufacturing method, silicon ingot manufacturing method, homoepitaxial wafer manufacturing method

摘要

To solve the problem of being unable to inspect the presence of a crack that could be the starting point of a crack. A crucible inspection device for inspecting the fragility of a silica glass crucible, which is installed on the surface of a silica glass crucible and detects an AE (Acoustic Emission) wave generated when a predetermined external force is applied to the silica glass crucible. It has a wave detection means. The crucible inspection apparatus evaluates the ease of cracking of the silica glass crucible based on the detection result by the AE wave detection means.