EVALUATION METHOD FOR CHARGED PARTICLE BEAM, COMPUTER PROGRAM FOR EVALUATING CHARGED PARTICLE BEAM, AND EVALUATION DEVICE FOR CHARGED PARTICLE BEAM

摘要

The purpose of the present invention is to provide an evaluation method for a charged particle beam and an evaluation device for a charged particle beam whereby a beam diameter can be expressed from an image, the beam diameter being a major device factor for determining the resolution and image sharpness of an image obtained using a charged particle beam device. To achieve the purpose described above, the present invention provides an evaluation device for a charged particle beam, the evaluation device being provided with an arithmetic unit for evaluating the charged particle beam on the basis of image processing of an image obtained using the charged particle beam device, wherein the arithmetic unit in the proposed method and device performs automatic length measurement of the particle diameter on the image, and calculates the beam diameter of the charged particle beam device on the basis of the particle diameter reference value of an evaluation sample.