ZnO Vapor-Confined Face-to-Face Annealing Method for Regrowth of ZnO nanorods

摘要

The present invention relates to a vapor-confined face-to-face annealing (VC-FTFA) method for regrowing ZnO nanorods and ZnO nanorods prepared by the method. ZnO nanorods are regrown by using the vapor-confined face-to-face annealing method according to the present invention. So, it is possible to obtain ZnO nanorods having significantly improved optical and electrical properties compared to ZnO films exposed and annealed in the air. The method includes a step of manufacturing the precursor of an ZnO layer, a step of forming a space between a first ZnO layer and a second ZnO layer, and an annealing step.