OXIDE EVAPORATION MATERIAL AND HIGH-REFRACTIVE-INDEX TRANSPARENT FILM

摘要

According to the present invention, an oxide deposited material contains indium oxide as a main component; is composed of a sintered body containing cerium exceeding 0.110 and not greater than 0.538 in a Ce/In atomic ratio; and has an L* value of 62-95 in CIE 1976 color system. Since the oxide deposited material having the L* value of 62-95 has an optimum amount of oxygen, an amount of oxygen gas introduced into a deposition vacuum chamber has low resistance with a low refractive index of at least 2.15-2.51 at a wavelength of 550 nm. A transparent film of high transparency and high refractive index in visible region to near infrared region is able to be produced by a vacuum deposition method, and a difference in composition between the film and the deposited material is able to be reduced since an amount of introduced oxygen gas is small.