Method for forming fine pattern including line portion and pad portion

摘要

A first open region which is set so as to face the partition block portion and a second open region which is branched from the one side of the partition block portion to the first open region, And a spacer is attached to the side wall of the partition to form a second open area overlapping with the first open area of the partition, Forming a spacer attached to the sidewalls of the first line portions, removing the partition to expose a third open region overlapping the partition block portion, exposing a region between the spacers, filling the regions exposed by the spacer, Forming a target pattern including the third line portions, the first pad block portion filling the second open region, and the second pad block portion filling the third open region, and the first and second pad portions, It presents a fine pattern formation method of separating the rock portions as a plurality of pad portions.