首页> 外国专利> - Method for manufacturing fan-out wafer level package using metal core solder ball in interconnector for PoP

- Method for manufacturing fan-out wafer level package using metal core solder ball in interconnector for PoP

机译:-在PoP互连器中使用金属芯焊球制造扇出晶圆级封装的方法

摘要

A fan-out wafer ready package manufacturing method of the present invention includes the steps of preparing a silicon sacrificial substrate, forming a sacrificial pad directly on the sacrificial substrate, mounting a metal core solder ball interconnector on the sacrificial pad, A step of mounting a semiconductor chip on which a contact metal is formed on a sacrificial substrate in face-up form, molding the protective member on the sacrificial substrate, grinding a part of the upper surface of the sacrificial substrate, First planarizing until the contact metal is exposed, forming a re-wiring layer on the exposed contact metal and the interconnector, and secondly planarizing to remove at least the sacrificial substrate. According to the structure of the present invention as described above, the thickness of the package can be freely adjusted.
机译:本发明的扇出晶片就绪封装的制造方法包括以下步骤:准备硅牺牲衬底;在牺牲衬底上直接形成牺牲垫;在牺牲垫上安装金属芯焊球互连器;以及安装步骤。在牺牲基板上以面朝上的形式在其上形成接触金属的半导体芯片,在牺牲基板上模制保护构件,研磨牺牲基板的上表面的一部分,首先进行平坦化,直到露出接触金属,形成在暴露的接触金属和互连器上的再布线层,其次是平坦化以至少去除牺牲衬底。根据如上所述的本发明的结构,包装的厚度可以自由地调节。

著录项

  • 公开/公告号KR20170063231A

    专利类型

  • 公开/公告日2017-06-08

    原文格式PDF

  • 申请/专利权人 하나 마이크론(주);

    申请/专利号KR20150169362

  • 发明设计人 이현우;정진욱;김현주;옥진영;

    申请日2015-11-30

  • 分类号H01L25/07;H01L23;H01L23/28;H01L23/34;H01L23/488;H01L23/495;H01L23/525;

  • 国家 KR

  • 入库时间 2022-08-21 13:27:23

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