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EWT MANUFACTURING METHOD OF SILICON THIN FILM FOR EMITTER WRAP-THROUGH SOLAR CELL SUBSTRATE

机译:发射包裹通过太阳能电池基质的硅薄膜的EWT制造方法

摘要

The purpose of the present invention is to obtain a silicon thin film for an EWT solar cell substrate, particularly, a porous silicon thin film formed up to a P-N junction by a simple process. To this end, the present invention provides a method for manufacturing a silicon thin film for an EWT solar cell substrate, which includes the steps of: forming a plurality of holes on a silicon base material; depositing a stress layer on the surface of the silicon base material; and separating the stress layer and a surface layer of the silicon base material as a thin film by the stress of the stress layer.
机译:本发明的目的是获得用于EWT太阳能电池基板的硅薄膜,特别是通过简单的工艺形成直至P-N结的多孔硅薄膜。为此,本发明提供一种用于EWT太阳能电池基板的硅薄膜的制造方法,其包括以下步骤:在硅基材上形成多个孔;以及在所述硅基板上形成多个孔。在硅基材的表面上沉积应力层;通过该应力层的应力将应力层和硅基材的表面层作为薄膜分离。

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