AN ELECTROSTATIC ACTUATOR METHOD FOR OPERATING A MICROMECHANICAL COMPONENT WITH THE ELECTROSTATIC ACTUATOR AND METHOD FOR PRODUCING THE ELECTROSTATIC ACTUATOR

摘要

The present invention relates to an electrostatic actuator having three or more intermediate frames (10), each of two adjacent intermediate frames (10) having one or more intermediate springs (14) longitudinally lying on a first rotational axis (16) And an intermediate electrode finger 22 is disposed on the frame bar 10a of the intermediate frame 10 oriented parallel to the first rotation axis 16 and the electrostatic actuator is connected to the first rotation axis 16 (12) which is connected to the outermost intermediate frame (10) and which surrounds the intermediate frame (10) by one or more external springs (18) longitudinally lying on a second rotational axis (20) The outermost intermediate frame 10 and the frame bars 10b and 12a of the outer frame 12 among three or more intermediate frames 10 oriented in parallel with the second rotation axis 20 in this case, An external electrode finger 30 is disposed. The present invention also relates to a micro machine part having the electrostatic actuator, a method of operating the micro machine part, and a method of manufacturing the electrostatic actuator and the micro machine part.