- - Electro-optic modulator and testing apparatus comprising the electro-optic modulator

摘要

The technical idea of the present invention provides an electro-optical modulator that can be used to detect a pixel defect in a high-resolution display having fine pitch and an inspection apparatus including the electro-optical modulator. The inspection apparatus includes a light source; An electro-optic modulator disposed on the inspection object and having a reflective film formed of CLC polymer, the intensities of the reflected light of the corresponding portion being different according to the voltage distribution of the inspection object; A beam splitter (BS) that transmits or reflects light; A first optical system for transmitting light from the light source to the beam splitter; And a second optical system for transmitting light from the beam splitter to the electro-optic modulator and transmitting the reflected light from the electro-optic modulator to the beam splitter.