ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIBBON BEAMS

摘要

An ion beam angle calibration and emittance measurement system (200) comprising a plate having elongate slits (204) therein, wherein the elongated slit (204) is located at the center of rotation of the plate . A beam current detector is configured to measure a first beam current associated with the first beam portion (213), and includes a slit (208) configured to pass a second beam portion (215) of the first beam portion And is located downstream of the plate. A beam angle detector 206 is located downstream of the beam current detector and is configured to detect a second beam current associated with the second beam portion. The plate, the beam current detector and the beam angle detector are configured to collectively rotate about the rotational center of the plate.;