APPARATUS FOR MANUFACTURING POLYSILICON WITH EXCELLENT GROUND FAULT CURRENT PREVENTION AND SILICON DUST REMOVAL EFFECTS

摘要

Disclosed is an apparatus for manufacturing polysilicon with excellent ground fault current prevention and silicon dust removal effects. The apparatus for manufacturing polysilicon according to the present invention includes: a housing with an opened lower side; and a chamber comprising a base plate coupled to the lower side of the housing. A ceramic particle layer which is for preventing silicon dust generated from a manufacturing process from directly touching the base plate and is removed with the silicon dust after the manufacturing process, is located on the upper side of the base plate.