EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD FOR GENERATING EXTREME-ULTRAVIOLET LIGHT

摘要

Extreme ultraviolet light generating device comprises a laser beam generating system, the laser beam generating laser control system for controlling at least one of the light intensity and output timing of the at least one laser beam which is output from the system, the laser beam generating one or more laser beams outputted from the system It is provided to the one or more chambers, and the chambers are incident hole provided for introducing therein may comprising a target supply for supplying a target material to a predetermined area of ​​the chamber. Thus, to improve the CE of the extreme ultraviolet light generating apparatus.;