CATALYST FOR PRODUCING HIGHER SILANE AND METHOD FOR PRODUCING HIGHER SILANE

摘要

A catalyst for producing a high-quality silane at a high yield at a relatively low temperature while suppressing decomposition into solid silicon, and a method for producing a high-grade silane by the catalyst. A catalyst for converting a porous oxide-containing, low-grade silane to a high-grade silane, wherein the porous oxide comprises at least pores regularly arranged and mainly composed of silicon oxide, and the content of alkali metals and alkaline-% Or more and 2.00 wt% or less.