BI-DIRECTIONAL THERMAL MICROMECHANICAL ACTUATOR AND METHOD OF ITS MANUFACTURE

摘要

FIELD: physics.;SUBSTANCE: micromechanical actuator is designed as a formed elastically-hinged cantilever beam in the mesa structure consisting of the parallel trapezoidal inserts from the mono-crystallic silicon substrate of p-type with orientation [100] disposed perpendicular to the main axis of the cantilever beam and connected with the polyimide layers formed of the polyimide film, a heater and electroconductive busbars forming an ohmic contact with silicon, the trapezoidal inserts are made on the opposite sides of the elastically-hinged cantilever beam and form, at least, two deformation zones.;EFFECT: providing opportunities to increase the operational reliability in a wide temperature range.;11 cl, 5 dwg