Micromechanical device, micromirror-based laser system and method for monitoring a micromirror-based laser system

摘要

The present invention provides a micromechanical device for a micromirror-based laser system for detecting an incident laser beam. For this purpose, two sensor diodes are arranged on a common substrate in the micromechanical component, wherein only one of the two sensor diodes is designed as a photodiode. The further sensor diode provides an output signal independent of the incidence of light. By comparing the two output signals of both diodes can be concluded that a light incident in the micromechanical device.