MICROMECHANICAL COMPONENT, MICROMIRROR-BASED LASER SYSTEM, AND METHOD FOR MONITORING A MICROMIRROR-BASED LASER SYSTEM

摘要

A micromechanical component for a micromirror-based laser system for detecting an incident laser beam. Two sensor diodes are situated on a shared substrate in the micromechanical component, only one of the two sensor diodes being designed as a photodiode. The further sensor diode supplies an output signal independent of an incidence of light. By comparing the two output signals of the two diodes, an incidence of light in the micromechanical component may be inferred.