Image sequence and evaluation method, system and computer program for structured illumination microscopy for measuring a 3D height map

摘要

In the sample surface of the multiple spatial positions for the method and apparatus for determining height, light beam is projected on the surface. The light beam has optical axis of the sine space pattern at least two directions perpendicular to light beam, and these space patterns are moved to different positions. The surface is scanned, along in the different scan position of the optical axis. Between the subsequent spatial framework of distance that move between the position with fixed relationship, the presence of the distance between scanning follow up scan orientation. The light that its surface is reflected is measured the position for having corresponding space pattern with spatial framework in scan position by the following method. From the light detected, the intensity value on the surface of each spatial position, envelope is determined corresponding to scan position. The maximum value of envelope curve and its corresponding scan position represent height space surface of position and are selected. Space pattern moving step sequence 2n (n & 2) the first and second spaces be directed toward distance on 1/n patterns 1/4 and wavelength a part.