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METHODS OF POLYMERIZING SILANES AND CYCLOSILANES USING N-HETEROCYCLIC CARBENES AND METAL COMPLEXES HAVING N-HETEROCYCLIC CARBENE LIGANDS
METHODS OF POLYMERIZING SILANES AND CYCLOSILANES USING N-HETEROCYCLIC CARBENES AND METAL COMPLEXES HAVING N-HETEROCYCLIC CARBENE LIGANDS
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机译:使用N-杂环碳和具有N-杂环碳配体的金属络合物聚合硅烷和环硅氧烷的方法
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摘要
Compositions and methods for controlled polymerization and/or oligomerization of silane (and optionally cyclosilane) compounds, including those of the general formulae SinH2n and SinH2n+2, as well as halosilanes and arylsilanes, to produce soluble polysilanes, polygermanes and/or polysilagermanes having low levels of carbon and metal contaminants, high molecular weights, low volatility, high purity, high solubility and/or high viscosity. The polysilanes, polygermanes and/or polysilagermanes are useful as a precursor to silicon- and/or germanium-containing conductor, semiconductor and dielectric films.
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