首页> 外国专利> COMPOUND, RESIN, LITHOGRAPHY UNDERLAYER FILM FORMING MATERIAL, LITHOGRAPHY UNDERLAYER FILM FORMING COMPOSITION, LITHOGRAPHY UNDERLAYER FILM, METHOD FOR FORMING RESIST PATTERN, METHOD FOR FORMING CIRCUIT PATTERN, AND METHOD FOR PURIFYING COMPOUND OR RESIN

COMPOUND, RESIN, LITHOGRAPHY UNDERLAYER FILM FORMING MATERIAL, LITHOGRAPHY UNDERLAYER FILM FORMING COMPOSITION, LITHOGRAPHY UNDERLAYER FILM, METHOD FOR FORMING RESIST PATTERN, METHOD FOR FORMING CIRCUIT PATTERN, AND METHOD FOR PURIFYING COMPOUND OR RESIN

机译:复合材料,树脂,光刻技术的成膜材料,光刻技术的底层成膜材料,光刻技术,形成抗蚀剂的方法,电路图案的形成方法以及纯化化合物或树脂的方法

摘要

A compound represented by the following formula (1). (in formula (1), R 1 represents a 2n-valent group having 1 to 30 carbon atoms, R 2 to R 5 each independently represent an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, a thiol group or a hydroxyl group, provided that at least one R 4 and/or at least one R 5 represents an alkoxy group having 1 to 30 carbon atoms, m 2 and m 3 are each independently an integer of 0 to 8, m 4 and m 5 are each independently an integer of 0 to 9, provided that m 4 and m 5 are not 0 at the same time, n is an integer of 1 to 4, and p 2 to p 5 are each independently an integer of 0 to 2.)
机译:由下式(1)表示的化合物。(在式(1)中,R 1表示具有1至30个碳原子的2n价基团,R 2至R 5各自独立地表示具有1至10个碳原子的烷基,芳基具有6至10个碳原子,碳原子数为2至10的烯基,碳原子数为1至30的烷氧基,硫醇基或羟基,条件是至少一个R 4和/或至少一个R 5代表具有1至1个碳原子的烷氧基。假设30个碳原子m 2和m 3各自独立地为0到8的整数,m 4和m 5各自独立地为0到9的整数,但前提是m 4和m 5同时不为0,n是1到4的整数,p 2到p 5分别是0到2的整数。)

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