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TIME-MULTIPLEXED SPECTRALLY CONTROLLED INTERFEROMETRY

机译:倍频频谱控制干涉

摘要

A tunable light source (10,30) having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white- light interferometry. A suitable time-modulated source (30) combines a coherent source (32) with an optical modulator (36) and a waveform generator (34) synchronized with the source.
机译:具有时间相干长度以使得在干涉仪的光程差之内检测到干涉条纹的可调光源(10,30)被光谱控制以在干涉仪的检测器的积分时间的连续分数期间产生多个波长。选择波长以便根据光谱控制干涉测量法(SCI)原理在每个积分时间产生可见的相关图。这样的不同波长可以通过逐步或连续调制来产生。依次重复进行调制步骤,同时更改调制周期,以产生一系列干涉条纹的预定空间图案,这是干涉测量所需的。该方法使SCI可以与用于常规相移的共通设备一起使用,从而结合了高相干性和白光干涉测量的优点。合适的时间调制源(30)将相干源(32)与光学调制器(36)以及与该源同步的波形发生器(34)组合在一起。

著录项

  • 公开/公告号EP3338052A1

    专利类型

  • 公开/公告日2018-06-27

    原文格式PDF

  • 申请/专利权人 OLSZAK ARTUR;

    申请/专利号EP20160839755

  • 发明设计人 OLSZAK ARTUR;

    申请日2016-06-29

  • 分类号G01B9/02;

  • 国家 EP

  • 入库时间 2022-08-21 13:16:05

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