TRANSPORT CONTAINER CONNECTION DEVICE, LOAD PORT DEVICE, TRANSPORT CONTAINER PRESERVATION STOCKER, AND TRANSPORT CONTAINER CONNECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a transport container connection device advantageous for a reduction in size.;SOLUTION: A transport container connection device for connecting a wafer transport container to a wall opening includes a movable table capable of approaching the wall opening and separating therefrom, multiple support pins projecting upward from the movable table, each having a tip coming into contact with a bottom face of the wafer transport container, and supporting the wafer transport container, an enclosure having an anchor block supporting the movable table, and a wall extending upward from the anchor block and in which the wall opening is formed, and an information reading section movable between a first position where the whole is located below an upper surface of the movable table, and a second position where at least a part is located above the upper surface of the movable table, and reading information of an information holding part provided in the wafer transport container supported by the support pins at the second position.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2019,JPO&INPIT