TRANSPORT CONTAINER CONNECTING DEVICE, LOAD PORT DEVICE, TRANSPORT CONTAINER STORAGE STOCKER, AND TRANSPORT CONTAINER CONNECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a transport container connecting device or the like having a simple structure and excellent durability and maintainability.;SOLUTION: A transport container connecting device includes: a movable table capable of approaching and separating from a wall opening; a plurality of support pins that protrude upward from the movable table and support a wafer transport container; a housing part including a fixing base for supporting the movable table and a wall part which extends upward from the fixing base and in which the wall opening is formed; and a clamping mechanism that includes a gripping portion to be engaged with a groove portion formed on the bottom surface of the wafer transport container provided to the support pin and that prevents the wafer transport container from being separated from the support pin, and the clamp mechanism is connected to the housing part separately from the movable table.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2018,JPO&INPIT