Hybrid coloring method for multi-pattern technology

摘要

In one aspect of the present disclosure, methods, computer readable media, and apparatus are provided for assigning colors to features for a multiple patterning process. The apparatus receives integrated circuit layout information including a set of features and an assigned color of the plurality of colors for each feature of the first subset of features of the set of features. In addition, the apparatus performs color separation on the second subset of features to assign colors to the features in the second subset of features. The second subset of features includes features in the set of features that are not included in the first subset of features with the assigned color.