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Lithographic apparatus, method for positioning an object in a lithographic apparatus, and device manufacturing method
Lithographic apparatus, method for positioning an object in a lithographic apparatus, and device manufacturing method
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机译:光刻设备,用于在光刻设备中定位物体的方法以及器件制造方法
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摘要
A lithographic apparatus including: a first object, a second object which is moveable relative to the first object in a moving direction, a set of cables and/or tubing arranged between the first object and the second object, a guiding drum to guide the set of cables and/or tubing, the guiding drum being rotatable about a rotation axis extending perpendicular to the moving direction, a drum positioning device to position the guiding drum such that it follows movement of the set of cables and/or tubing caused by movement of the second object relative to the first object and a guiding structure to guide movement of the guiding drum in the moving direction.
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