OBJECT POSITIONER DEVICE, STAGE SUPPORT, LITHOGRAPHIC APPARATUS, OBJECT INSPECTION APPARATUS, METHOD FOR ADAPTING AN OBJECT POSITIONER DEVICE, DEVICE MANUFACTURING METHOD

摘要

The invention provides an object positioner device, which comprises: - a stage which is configured to position an object in a positioning plane, - a base frame, - a frame support foot, which is configured to support the base frame on a support surface, - a stage support, which stage support comprises: - a stage support body, - a first connector, which connects the stage and the stage support body to each other in a direction perpendicular to the positioning plane, - a stage support foot, which is configured to support the stage support body on the support surface. - wherein the stage support further comprises a second connector, which connects the stage support body and the base frame to each other.