Metal oxide thin film, method for depositing metal oxide thin film, and apparatus comprising metal oxide thin film

摘要

The present invention relates to a metal oxide thin film containing β-MoO 3 containing at least one doping element selected from the group consisting of Re, Mn and Ru. The present invention further relates to a method for producing such a metal oxide thin film by sputtering, and a metal oxide comprising β-MoO 3 containing at least one doping element selected from the group of Re, Mn and Ru. The present invention relates to a thin film device containing a thin film. [Selection] Figure 1