Ultra-fast review device and super fast review method

摘要

PROBLEM TO BE SOLVED: To provide an ultrahigh speed review device and an ultrahigh speed review method of acquiring the image of a measurement point on a sample at an ultrahigh speed and estimating the specification of a substance such as foreign matter at a microregion in the vicinity without reducing the throughput of the total.SOLUTION: The device includes: a grouping means in which, based on measurement object coordinate data obtained by setting the coordinates as a plurality of measurement objects on a sample, the measurement objects totally scanning a plurality of the measurement objects on the sample are grouped to create measurement object groups; and a scanning image acquiring means in which, per measurement object group grouped by the grouping means, the sample is moved at a high speed as possible between the measurement object groups, and, in the measurement object groups, while the sample is moved at a fixed speed in the measurement object group, the scanning is repeatedly performed in the movement direction and the orthogonal direction of the sample with electron beans to acquire images, and, from the images of the respective measurement object groups acquired by the scanning image acquiring means, the measurement of a plurality of the measurement objects is performed, respectively.