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System and method for non-contact microscopy in three-dimensional pre-characterization of samples for navigation of rapid and non-destructive samples during nanoprobing
System and method for non-contact microscopy in three-dimensional pre-characterization of samples for navigation of rapid and non-destructive samples during nanoprobing
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机译:用于样品的三维预表征中的非接触式显微镜的系统和方法,用于在纳米探测过程中导航快速且无损的样品
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摘要
A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
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