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Electron gun, three-dimensional layered modeling apparatus and electron gun control method
Electron gun, three-dimensional layered modeling apparatus and electron gun control method
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机译:电子枪,三维分层建模装置和电子枪控制方法
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摘要
PROBLEM TO BE SOLVED: To prevent occurrence of an electron beam of an unintentional large current.SOLUTION: An electron gun 10 includes a cathode 11, a Wehnelt electrode 12, a control electrode 13, an anode 14, and a control part 25. The control part 25 controls an output value and output timing of a bias voltage to be changed by a bias supply 22, and an output value and output timing of a control voltage to be changed by a control electrode supply 23 so that a beam current generated by an electron beam B1 to be emitted toward a powder sample 8 reaches a set current value.
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